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App. No. 10/238,803 · Confirmation No. 7965

Cleaning of processing chambers with dilute NF3 plasmas

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2006-04-18 ABN Abandonment 2 View
2005-09-21 CTFR Final Rejection 8 View
2005-09-21 FWCLM Index of Claims 1 View
2005-09-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-06-23 CLM Claims 4 View
2005-06-23 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2005-06-23 WFEE Fee Worksheet (SB06) 1 View
2005-06-23 FWCLM Index of Claims 1 View
2005-03-28 CTNF Non-Final Rejection 8 View
2005-03-28 1449 List of References cited by applicant and considered by examiner 1 View
2005-03-28 892 List of references cited by examiner 1 View
2005-03-28 FWCLM Index of Claims 1 View
2005-03-28 SRFW Search information including classification, databases and other search related notes 1 View
2005-03-28 CLM Claims 3 View
2005-03-28 FOR Foreign Reference 2 View
2005-03-18 SRNT Examiner's search strategy and results 20 View
2002-09-10 TRNA Transmittal of New Application 3 View
2002-09-10 SPEC Specification 22 View
2002-09-10 CLM Claims 3 View
2002-09-10 ABST Abstract 1 View
2002-09-10 DRW Drawings-only black and white line drawings 10 View
2002-09-10 OATH Oath or Declaration filed 4 View
2002-09-10 WFEE Fee Worksheet (SB06) 1 View
2002-09-10 WFEE Fee Worksheet (SB06) 1 View
2002-09-10 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-09-10 FOR Foreign Reference 33 View
2002-09-10 FOR Foreign Reference 46 View
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Quick Facts
App. No.
10/238,803
Filed
2002-09-10
Pub. No.
US20040045577A1
Art Unit
1746