Patent Assignment
Reel/Frame 013306/0584
Assignment of Assignor's Interest
Recorded: 2002-09-18
Pages: 2
Assignor
TOKUNAGA, KENJI
Executed: 2002-08-27
Assignee
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
16-1 ONOGAWA, TSUKUBA-SHI, IBARAKI, 305-0053, JAPAN
Covered Property
(1)
Wafer Carrier, Wafer Conveying System, Stocker, and Method of Replacing Gas
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.