Wafer carrier, wafer conveying system, stocker, and method of replacing gas
When atmosphere inside a wafer carrier is replaced by introducing a gas into the wafer carrier from a gas inlet provided to the wafer carrier that can accommodate wafers. At the same time, the atmosphere inside the wafer carrier is sucked to make an inside pressure negative relative to an outside pressure.
1. A method of replacing atmosphere inside a wafer carrier by introducing a gas into an inside of said wafer carrier from a first gas inlet provided to the wafer carrier accommodating wafers, comprising the steps of:
placing a plurality of wafer carriers including said wafer carrier in a stocker;
sucking the atmosphere inside said wafer carrier to make the inside pressure negative relative to the outside atmosphere of said wafer carrier;
maintaining an inert atmosphere in the stocker; and
letting an inert gas flow into an inside of said wafer carrier from said inert atmosphere in the stocker through a second inlet provided to said wafer carrier by said negative pressure of the wafer carrier.
2. A method of replacing atmosphere according to claim 1 , wherein the step of sucking atmosphere is performed while a gas is introduced into inside said wafer carrier.
3. The method of replacing a atmosphere according to claim 1 , wherein the step of the sucking atmosphere is performed by deflecting the direction of sucking atmosphere.
4. The method of replacing atmosphere according to claim 1 , wherein the step of maintaining an atmosphere in the stocker is conducted by circulating inert gas by passing the inert gas through a filter, wherein the inert gas is inhaled from an intake which is different from said first gas inlet.