Patent Assignment
Reel/Frame 013321/0618
Assignment of Assignor's Interest
Recorded: 2002-09-20
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus for Reducing Polymer Deposition on a Substrate and Substrate Support
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.