Patent Assignment
Reel/Frame 015891/0322
Re-Recorded to Correct the State of Incorporation in the Assignment Document Previously Recorded at Reel 013321 Frame 0618.
Recorded: 2005-03-11
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus for Reducing Polymer Deposition on a Substrate and Substrate Support
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.