Patent Assignment
Reel/Frame 013324/0277
Assignment of Assignor's Interest
Recorded: 2002-09-19
Pages: 3
Assignors
YIM, KANG SUB
Executed: 2002-09-10
TAM, MELISSA M.
Executed: 2002-09-10
SUGIARTO, DIAN
Executed: 2002-09-13
LANG, CHI-I
Executed: 2002-09-10
LEE, PETER WAI-MANN
Executed: 2002-09-12
XIA, LI-QUN
Executed: 2002-09-10
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Low Dielectric (Low K) Barrier Films with Oxygen Doping by Plasma-Enhanced Chemical Vapor Deposition (Pecvd)