Patent Assignment
Reel/Frame 013326/0285
Assignment of Assignor's Interest
Recorded: 2002-09-23
Pages: 2
Assignors
BUN, TAMIHIRO
Executed: 2002-09-06
MURATA, KINYA
Executed: 2002-09-05
HASHINOKI, KENJI
Executed: 2002-09-04
KAMEI, KENJI
Executed: 2002-09-18
YOKONO, NORIAKI
Executed: 2002-09-13
SUGIMOTO, KENJI
Executed: 2002-09-17
MITSUHASHI, TSUYOSHI
Executed: 2002-09-06
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Control System and Substrate Processing Apparatus