Patent Assignment
Reel/Frame 013347/0899
Assignment of Assignor's Interest
Recorded: 2002-09-30
Pages: 5
Assignors
NAKAHARA, MIKWAKO
Executed: 2002-06-20
TSUNEKAWA, SUKEYOSHI
Executed: 2002-06-20
WATANABE, KAZUTO
Executed: 2002-06-20
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO,, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device Having an Etching Treatment
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.