Patent Assignment
Reel/Frame 013348/0928
Assignment of Assignor's Interest
Recorded: 2002-09-30
Pages: 2
Assignors
PHAM, XUYEN
Executed: 2002-09-30
NGUYEN, TUAN A.
Executed: 2002-09-30
ZHOU, REN
Executed: 2002-09-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Systems for Controlling Belt Surface Temperature and Slurry Temperature in Linear Chemical Mechanical Planarization
Patent:
6,953,750 →
Application:
10/261,568 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.