Patent Assignment
Reel/Frame 013609/0096
Assignment of Assignor's Interest
Recorded: 2002-12-30
Pages: 2
Assignor
WU, PATRICK P.H.
Executed: 2002-12-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Systems for Controlling Belt Surface Temperature and Slurry Temperature in Linear Chemical Mechanical Planarization
Patent:
6,953,750 →
Application:
10/261,568 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.