Patent Assignment
Reel/Frame 013373/0320
Assignment of Assignor's Interest
Recorded: 2002-10-09
Pages: 3
Assignors
AHMAD, IMTIAZ
Executed: 2002-06-17
SCHRIEVER, GUIDO
Executed: 2002-06-17
KLEINSCHMIDT, JUERGEN
Executed: 2002-06-07
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, D-07745 JENA, GERMANY
Covered Property
(1)
Arrangement for Generating Extreme Ultraviolet (Euv) Radiation Based on a Gas Discharge
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.