Patent Assignment
Reel/Frame 013420/0356
Assignment of Assignor's Interest
Recorded: 2003-02-11
Pages: 4
Assignors
WALDFRIED, CARLO
Executed: 2003-02-05
HAN, QINGYUAN
Executed: 2003-02-06
ESCORCIA, ORLANDO
Executed: 2003-02-04
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Ashing Process for Removing Photoresist and Residues During Ferroelectric Device Fabrication
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 11, 2003
From: ANDIDEH, EBRAHIM
To: INTEL CORPORATION
Reel/Frame 013420/0401 →
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →