Patent Assignment
Reel/Frame 013472/0877
Assignment of Assignor's Interest
Recorded: 2002-11-06
Pages: 3
Assignee
NPTEST, INC.
150 BAYTECH DRIVE, LEGAL DEPARTMENT, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Precise, in-Situ Endpoint Detection for Charged Particle Beam Processing
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.