Patent Assignment
Reel/Frame 013507/0016
Assignment of Assignor's Interest
Recorded: 2002-11-15
Pages: 6
Assignors
HANSON, KYLE M.
Executed: 2002-10-30
BATZ, ROBERT W., JR.
Executed: 2002-11-04
BASKARAN, RAJESH
Executed: 2002-10-31
ZIMMERMAN, NOLAN
Executed: 2002-10-31
HU, ZHONGMIN
Executed: 2002-10-31
WILSON, GREGORY J.
Executed: 2002-10-31
MCHUGH, PAUL R.
Executed: 2002-11-04
Assignee
SEMITOOL, INC.
655 WEST RESERVE DRIVE, KALISPELL, MONTANA, 59901
Covered Property
(1)
Apparatus and Method for Thermally Controlled Processing of Microelectronic Workpieces
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.