Patent Assignment
Reel/Frame 013535/0226
Assignment of Assignor's Interest
Recorded: 2002-11-27
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Multi-Exposure Lithography Method and System Providing Increased Overlay Accuracy