Patent Assignment
Reel/Frame 013553/0580
Assignment of Assignor's Interest
Recorded: 2002-12-03
Pages: 2
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method and System for Phase/Amplitude Error Detection of Alternating Phase Shifting Masks in Photolithography