Patent Assignment
Reel/Frame 013556/0516
Assignment of Assignor's Interest
Recorded: 2002-12-06
Pages: 5
Assignors
KIENZLE, OLIVER
Executed: 2002-10-23
STENKAMP, DIRK
Executed: 2002-10-23
STEIGERWALD, MICHAEL
Executed: 2002-10-24
KNIPPELMEYER, RAINER
Executed: 2002-10-24
HAIDER, MAX
Executed: 2002-10-31
MULLER, HEIKO
Executed: 2002-11-04
UHLEMANN, STEPHAN
Executed: 2002-11-04
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Examining System for the Particle-Optical Imaging of an Object, Deflector for Charged Particles as Well as Method for the Operation of the Same
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.