Patent Assignment
Reel/Frame 015672/0930
Change of Name
Recorded: 2004-08-12
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-09-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Examining System for the Particle-Optical Imaging of an Object, Deflector for Charged Particles as Well as Method for the Operation of the Same
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 6, 2002
From: KIENZLE, OLIVER; STENKAMP, DIRK; STEIGERWALD, MICHAEL; KNIPPELMEYER, RAINER
To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Reel/Frame 013556/0516 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →