Patent Assignment
Reel/Frame 013568/0306
Assignment of Assignor's Interest
Recorded: 2002-12-09
Pages: 2
Assignee
LAMBDA PHYSIK AG
HANS-BOCKLER-STRASSE 12, D-37079 GOTTINGEN, GERMANY
Covered Property
(1)
On-Line Quality Control of the Key Optical Components in Lithography Lasers Using Laser Induced Fluorescence
Patent:
6,839,375 →
Application:
10/236,036 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.