Patent Assignment
Reel/Frame 013598/0400
Assignment of Assignor's Interest
Recorded: 2002-12-19
Pages: 3
Assignor
MATSUYAMA, YUJI
Executed: 2002-04-26
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, JAPAN
Covered Property
(1)
Substrate Coating Unit and Substrate Coating Method