Substrate coating unit and substrate coating method
The present invention is a coating unit for coating a substrate with a coating solution, comprising a coating solution discharge member for discharging the coating solution to the substrate which is positioned in a downward part. A lower surface of the coating solution discharge member is in a shape having a length longer, at least, than the radius of the substrate and having a narrow width. A coating solution discharge port is disposed in a portion of the coating solution discharge member, facing the center of the substrate, while a solvent mist discharge port for discharging a solvent mist of the coating solution is disposed in a portion facing a peripheral portion including an outer edge potion of the substrate, when the coating solution discharge member is positioned above the radius of the substrate.
1. A coating unit for coating a substrate with a coating solution, comprising:
a coating solution discharge device configured to discharge the coating solution onto the substrate and having a length longer than a radius of the substrate, the coating solution discharge device having at least one coating solution discharge port positioned to supply the coating solution to a center portion of the substrate and a plurality of solvent mist discharge ports positioned to supply a solvent mist of the coating solution to peripheral portions of the substrate;
a storage section configured to store the coating solution and connected to the coating solution discharge port;
a discharge pressure adjusting chamber having a pressure and configured to discharge the coating solution onto the substrate at a predetermined pressure;
a gas supply passage through which a gas containing the solvent mist is supplied to the plurality of solvent mist discharge ports, wherein the gas supply passage is connected to the discharge pressure adjusting chamber, and a diffuser panel is disposed in the gas supply passage so that the gas containing the solvent mist is uniformly discharged from the plurality of solvent mist discharge ports; and
a pressure adjusting unit configured to adjust the pressure of the discharge pressure adjusting chamber.
2. A coating unit according to claim 1 ,
wherein the solvent mist discharge port comprises a slit.
3. A coating unit according to claim 1 ,
wherein the at least one coating solution discharge port comprises a plurality of coating solution ports.
4. A coating unit according to claim 3 ,
further comprising a supply system configured to supply the coating solution independently to each of the plurality of coating solution discharge ports.
5. A coating unit according to claim 1 ,
wherein each end portion of the coating solution discharge device has a plural number of the solvent mist discharge ports.
6. A coating unit according to claim 5 ,
further comprising a supply system configured to supply the solvent mist independently to each of the plurality of solvent mist discharge ports.
7. A coating unit according to claim 5 ,
wherein the plurality of solvent mist discharge ports has first ports and second ports, the first ports have a larger diameter than the second ports, and the first ports are positioned an outer end of the each end portion of the coating solution discharge device than the second ports.