Patent Assignment
Reel/Frame 013602/0332
Assignment of Assignor's Interest
Recorded: 2002-12-26
Pages: 3
Assignee
ANGSTRON SYSTEMS, INC.
3350 SCOTT BOULEVARD, #62, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
Application:
10/215,711 →
Publication:
US 2002/0197402
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.