Patent Assignment
Reel/Frame 013710/0212
Assignment of Assignor's Interest
Recorded: 2003-02-03
Pages: 3
Assignors
GOVORKOV, SERGEI V.
Executed: 2002-12-13
VOGLER, KLAUS WOLFGANG
Executed: 2002-11-20
VOSS, FRANK
Executed: 2002-11-04
HUA, GONGXUE
Executed: 2003-01-09
PAETZEL, RAINER
Executed: 2002-11-04
Assignee
LAMBDA PHYSIK AG
HANS-BOCKLER-STRASSE 12, D-37079 GOTTINGEN, GERMANY
Covered Property
(1)
Beam delivery system for lithographic exposure radiation source
Application:
10/267,002 →
Publication:
US 2003/0095580