Patent Application
Utility
App. No. 10/267,002
· Confirmation No. 8757
Beam delivery system for lithographic exposure radiation source
Expressly Abandoned -- During Examination
View Publication ↗
Inventors
Sergei V. Govorkov
Boca Raton, FL
Klaus Wolfgang Vogler
Goettingen, GERMANY
Frank Voss
Bad Gandersheim, GERMANY
Gongxue Hua
Coral Springs, FL
Rainer Paetzel
Dransfeld, GERMANY
Attorneys & Agents of Record
Classification
USPC
372/57
H01S3/225
B23K26/705
B23K2103/04
B23K2103/05
B23K26/12
B23K26/128
G01J1/4257
G03F7/70025
G03F7/70558
G03F7/70808
H01S3/0014
H01S3/134
Prosecution
- Examiner
- SCOTT JR, LEON
- Art Unit
- 2828
- Docket No.
- LMPY-4750
- Confirmation No.
- 8757
Publication
- Pub. No.
- US20030095580A1
- Pub. Date
- 2003-05-22
Parent
is a Continuation in-part of
→
App. 09/965,492
· US 6,487,229
Filed 2001-09-26
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Division of
→
App. 09/594,892
· US 6,327,290
Filed 2000-06-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation in-part of
→
App. 09/343,333
· US 6,219,368
Filed 1999-06-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
Claims priority from a provisional application
→
App. 60/119,973
Filed 1999-02-12
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/971,796
· US 6,463,084
Filed 2001-10-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Division of
→
App. 09/598,552
· US 6,442,182
Filed 2000-06-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
Claims priority from a provisional application
→
App. 60/140,530
Filed 1999-06-23
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/343,333
· US 6,219,368
Filed 1999-06-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
Claims priority from a provisional application
→
App. 60/119,973
Filed 1999-02-12
· Provisional Application Expired
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-03
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Quick Facts
- App. No.
- 10/267,002
- Filed
- 2002-10-07
- Pub. No.
- US20030095580A1
- Examiner
- SCOTT JR, LEON
- Art Unit
- 2828
External Links