Patent Assignment
Reel/Frame 013809/0533
Assignment of Assignor's Interest
Recorded: 2003-03-04
Pages: 5
Assignee
DIAMOND SEMICONDUCTOR GROUP, LLC
30 BLACKBURN CENTER, GLOUCESTER, MASSACHUSETTS, 01930-2226
Covered Property
(1)
Wafer Handling Apparatus and Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 30, 2006
From: DIAMOND SEMICONDUCTOR GROUP LLC
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 017083/0236 →
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →