Patent Assignment
Reel/Frame 013822/0103
Assignment of Assignor's Interest
Recorded: 2003-02-28
Pages: 3
Assignors
SAGO, YASUMI
Executed: 2002-12-20
IKEDA, MASAYOSHI
Executed: 2002-12-20
KANEKO, KAZUAKI
Executed: 2002-12-20
OKADA, TAKUJI
Executed: 2002-12-20
Assignee
ANELVA CORPORATION
5-8-1, YOTSUYA, FUCHU-SHI, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.