Patent Assignment
Reel/Frame 013840/0781
Assignment of Assignor's Interest
Recorded: 2003-03-12
Pages: 3
Assignors
SHINRIKI, HIROSHI
Executed: 2003-03-03
MATSUMOTO, KENJI
Executed: 2003-03-03
TATSUMI, TORU
Executed: 2003-03-03
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Forming Thin Film and Apparatus for Forming Thin Film