Method for forming thin film and apparatus for forming thin film
View Patent ↗A shower head having a plurality of ejection holes for supplying an organic metal gas at uniform density to the surface of a substrate and a plurality of ejection holes for supplying an oxidizing gas at uniform density to the same is provided in a reaction furnace of an MOCVD system. A heater for heating the inside to a temperature higher than the thermal decomposition point of the organic metal gas but lower than the film forming temperature is provided in the vicinity of the substrate side surface of the shower head.
1. A thin film forming method of forming a thin film containing a metal element on a substrate by chemical vapor deposition which utilizes a thermal decomposition reaction of an organometallic compound, characterized by comprising
heating, to a temperature higher than a thermal decomposition point of an organic metal gas but lower than a film forming temperature, an inside of a gas supply means for supplying an organic metal gas to a surface of the substrate at uniform density, wherein the heating occurs at a substrate-side of the gas supply means.
2. A thin film forming method of forming a thin film containing a metal element on a substrate by chemical vapor deposition which utilizes a thermal decomposition reaction of an organometallic compound, characterized by comprising
heating, to a temperature higher than a thermal decomposition point of an organic metal gas but lower than a film forming temperature, a portion of a gas supply means for supplying an organic metal gas and oxidizing gas to a surface of the substrate at uniform density, wherein the gas supply means comprises a plurality of first ejection holes for supplying the organic metal gas and a plurality of second ejection holes for supplying the oxidizing gas and only a peripheral portion of said first ejection holes are heated.
3. A thin film forming method according to claim 1 , wherein the organometallic compound includes an organometallic compound containing Pb, an organometallic compound containing Ti, and an organometallic compound containing Zr, and the thin film includes a PZT film.
4. A thin film forming method according to claim 3 , wherein the substrate-side of said gas supply means is heated to 240° C.
5. A thin film forming method according to claim 3 , wherein the gas supply means has a first partial structure having ejection holes for the organic metal gas and a second partial structure having a flow path for the organic metal gas communicating with the ejection holes, and the first partial structure is heated to 240° C., and the second partial structure is heated to 200° C.
6. A thin film forming method according to claim 1 , wherein the gas supply means has a first partial structure having ejection holes for the organic metal gas and a second partial structure having a flow path for the organic metal gas communicating with the ejection hole, and the first partial structure is heated to a temperature higher than the thermal decomposition point of the organic metal gas but lower than the film forming temperature, and the second partial structure is heated to a temperature lower than the thermal decomposition point of the organic metal gas.