Patent Assignment
Reel/Frame 013908/0493
Confirmatory License
Recorded: 2003-04-01
Pages: 3
Assignor
SANDIA CORPORATION
Executed: 2002-07-01
Assignee
U.S. DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVENUE, S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585-0162
Covered Property
(1)
Method to Fabricate Multi-Level Silicon-Based Microstructures via Use of an Etching Delay Layer
Patent:
6,930,051 →
Application:
10/165,861 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.