Patent Assignment
Reel/Frame 013920/0847
Assignment of Assignor's Interest
Recorded: 2003-04-07
Pages: 3
Assignors
YE, JUN
Executed: 2003-03-18
PEASE, R. FABIAN W.
Executed: 2003-03-18
CHEN, XUN
Executed: 2003-03-18
Assignee
BRION TECHNOLOGIES, INC.
4151 BURTON DRIVE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System and Method for Lithography Process Monitoring and Control
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.