Granted Patent
Utility
US 6,828,542
· Confirmation No. 5505
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-04-19 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-07-29 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2004-07-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-07-22 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-07-22 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-22 | FWCLM |
Index of Claims | 1 | View | |
| 2004-07-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-12 | DISQ |
Terminal Disclaimer review decision | 3 | View | |
| 2004-07-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-06-18 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2004-06-18 | SPEC |
Specification | 1 | View | |
| 2004-06-18 | CLM |
Claims | 11 | View | |
| 2004-06-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-06-18 | ABST |
Abstract | 1 | View | |
| 2004-06-18 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-18 | FOR |
Foreign Reference | 39 | View | |
| 2004-06-18 | DIST |
Terminal Disclaimer Filed | 2 | View | |
| 2004-05-26 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2004-05-24 | CTNF |
Non-Final Rejection | 5 | View | |
| 2004-05-24 | 1449 |
List of References cited by applicant and considered by examiner | 9 | View | |
| 2004-05-24 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-05-24 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-24 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-05-19 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-03-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-05-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-05-02 | FOR |
Foreign Reference | 39 | View | |
| 2003-04-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-04-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-04-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 9 | View | |
| 2003-04-24 | FOR |
Foreign Reference | 12 | View | |
| 2003-04-24 | FOR |
Foreign Reference | 51 | View | |
| 2003-03-18 | TRNA |
Transmittal of New Application | 3 | View | |
| 2003-03-18 | SPEC |
Specification | 76 | View | |
| 2003-03-18 | CLM |
Claims | 10 | View | |
| 2003-03-18 | ABST |
Abstract | 1 | View | |
| 2003-03-18 | DRW |
Drawings-only black and white line drawings | 30 | View | |
| 2003-03-18 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-03-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-03-18 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
250/208.1
G03F7/7085
G03F7/70591
G03F7/7065
Prosecution
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- Customer No.
- 37362
- Docket No.
- 213.002-US
- Confirmation No.
- 5505
Publication
- Pub. No.
- US20030226951A1
- Pub. Date
- 2003-12-11
Patent Term Adjustment
0days
Parent
Claims priority from a provisional application
→
App. 60/386,408
Filed 2002-06-07
· Provisional Application Expired
Child
is a Division of
→
App. 10/703,732
· US 6,803,554
Filed 2003-11-07
· Patented Case
Child
is a Division of
→
App. 10/873,539
· US 6,969,864
Filed 2004-06-21
· Patented Case
Child
is a Division of
→
App. 11/212,308
· US 7,053,355
Filed 2005-08-25
· Patented Case
Child
is a Division of
→
App. 10/646,313
· US 6,806,456
Filed 2003-08-22
· Patented Case
Child
is a Division of
→
App. 10/863,915
· US 6,969,837
Filed 2004-06-09
· Patented Case
Child
is a Division of
→
App. 10/755,809
· US 6,884,984
Filed 2004-01-12
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-04-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-04-07
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Quick Facts
- Patent No.
- US 6,828,542
- App. No.
- 10/390,806
- Filed
- 2003-03-18
- Granted
- 2004-12-07
- Pub. No.
- US20030226951A1
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- PTA
- 0 days
External Links