Granted Patent
Utility
US 6,806,456
· Confirmation No. 9773
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
Patented Case
View Patent ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-04-19 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2006-10-27 | N578 |
Notification of Withdrawal of Attorney | 2 | View | |
| 2006-09-28 | PA.. |
Power of Attorney | 2 | View | |
| 2004-06-11 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-06-11 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2004-06-08 | XRUSH |
Internal Response to Printer Query from Technology Center(TC) | 1 | View | |
| 2004-06-08 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-06-08 | SPEC |
Specification | 1 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-06-03 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2004-06-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-05-19 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-05-11 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-05-11 | SPEC |
Specification | 1 | View | |
| 2004-05-11 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-05-11 | ABST |
Abstract | 1 | View | |
| 2004-05-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-05-05 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-05-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-05-05 | 1449 |
List of References cited by applicant and considered by examiner | 8 | View | |
| 2004-05-05 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-05 | FWCLM |
Index of Claims | 1 | View | |
| 2004-04-24 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-04-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2004-01-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 9 | View | |
| 2003-08-22 | TRNA |
Transmittal of New Application | 4 | View | |
| 2003-08-22 | SPEC |
Specification | 76 | View | |
| 2003-08-22 | CLM |
Claims | 10 | View | |
| 2003-08-22 | ABST |
Abstract | 1 | View | |
| 2003-08-22 | DRW |
Drawings-only black and white line drawings | 30 | View | |
| 2003-08-22 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-08-22 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-08-22 | SPEC |
Specification | 1 | View | |
| 2003-08-22 | CLM |
Claims | 11 | View | |
| 2003-08-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-08-22 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2003-08-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-08-22 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
250/208.1
G03F7/7085
G03F7/70591
G03F7/7065
Prosecution
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- Customer No.
- 37362
- Docket No.
- 213.002-D1
- Confirmation No.
- 9773
Patent Term Adjustment
-128days
Parent
is a Division of
→
App. 10/390,806
· US 6,828,542
Filed 2003-03-18
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/386,408
Filed 2002-06-07
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/432,725
Filed 2002-12-12
· Provisional Application Expired
Child
is a Division of
→
App. 10/863,915
· US 6,969,837
Filed 2004-06-09
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-04-23
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,806,456
- App. No.
- 10/646,313
- Filed
- 2003-08-22
- Granted
- 2004-10-19
- Examiner
- LE, QUE TAN
- Art Unit
- 2878
- PTA
- -128 days
External Links