Patent Application
Provisional
Small
App. No. 60/386,408
· Confirmation No. 8621
Complete optical lithography inspection and process control
Provisional Application Expired
Inventors
Roger Fabian Pease
Stanford, CA
Jun Ye
Palo Alto, CA
Prosecution
- Confirmation No.
- 8621
Child
Claims priority from a provisional application
→
App. 10/755,809
· US 6,884,984
Filed 2004-01-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/873,539
· US 6,969,864
Filed 2004-06-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/703,732
· US 6,803,554
Filed 2003-11-07
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/863,915
· US 6,969,837
Filed 2004-06-09
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/646,313
· US 6,806,456
Filed 2003-08-22
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/390,806
· US 6,828,542
Filed 2003-03-18
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/386,408
- Filed
- 2002-06-07
External Links