IP Library › Granted Patent US 6,803,554
Granted Patent Utility
US 6,803,554 · Confirmation No. 2704

SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL

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2007-04-19 LET. Miscellaneous Incoming Letter 1 View
2004-07-22 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-07-22 LET. Miscellaneous Incoming Letter 1 View
2004-07-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-13 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-07-13 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-13 FWCLM Index of Claims 1 View
2004-06-22 WFEE Fee Worksheet (SB06) 1 View
2004-06-22 FWCLM Index of Claims 1 View
2004-06-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-11 SPEC Specification 1 View
2004-06-11 CLM Claims 14 View
2004-06-11 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-06-11 ABST Abstract 1 View
2004-06-11 LET. Miscellaneous Incoming Letter 1 View
2004-06-11 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2004-06-11 FOR Foreign Reference 39 View
2004-05-20 CTEQ Ex Parte Quayle Action 4 View
2004-05-20 892 List of references cited by examiner 1 View
2004-05-20 1449 List of References cited by applicant and considered by examiner 9 View
2004-05-20 FWCLM Index of Claims 1 View
2004-05-20 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-20 SRNT Examiner's search strategy and results 1 View
2004-05-19 LET. Miscellaneous Incoming Letter 2 View
2004-04-20 WFEE Fee Worksheet (SB06) 1 View
2004-03-22 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-01-12 IDS Information Disclosure Statement (IDS) Form (SB08) 9 View
2003-11-07 TRNA Transmittal of New Application 4 View
2003-11-07 SPEC Specification 76 View
2003-11-07 CLM Claims 10 View
2003-11-07 ABST Abstract 1 View
2003-11-07 DRW Drawings-only black and white line drawings 30 View
2003-11-07 OATH Oath or Declaration filed 2 View
2003-11-07 A.PE Preliminary Amendment 1 View
2003-11-07 SPEC Specification 1 View
2003-11-07 CLM Claims 13 View
2003-11-07 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-11-07 WCLM Claims Worksheet (PTO-2022) 1 View
2003-11-07 WFEE Fee Worksheet (SB06) 1 View
2003-11-07 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,803,554
App. No.
10/703,732
Filed
2003-11-07
Granted
2004-10-12
Pub. No.
US20040119036A1
Examiner
LE, QUE TAN
Art Unit
2878
PTA
0 days