Patent Assignment
Reel/Frame 013927/0925
Assignment of Assignor's Interest
Recorded: 2003-03-31
Pages: 4
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Forming a Thin Film with a Low Hydrogen Content on a Semiconductor Device