Patent Assignment
Reel/Frame 014060/0414
Assignment of Assignor's Interest
Recorded: 2003-05-12
Pages: 4
Assignors
EURLINGS, MARKUS FRANCISCUS ANTONIUS
Executed: 2003-04-11
CHEN, JANG FUNG
Executed: 2003-05-07
HSU, DUAN-FU STEPHEN
Executed: 2003-04-30
Assignee
ASML MASKTOOLS, B.V.
CORPORATE IP, BUILDING 7BO,DE RUN 6665, VELDHOVEN, 5504 DT, NETHERLANDS
Covered Property
(1)
Method of Removing Assist Features Utilized to Improve Process Latitude
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.