Patent Assignment
Reel/Frame 014064/0015
Assignment of Assignor's Interest
Recorded: 2003-05-13
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Refractive Projection Objective for Immersion Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.