Patent Assignment
Reel/Frame 014107/0945
Assignment of Assignor's Interest
Recorded: 2003-05-20
Pages: 2
Assignor
SCHILLING, PAUL E.
Executed: 2003-04-24
Assignee
SUPERCRITICAL SYSTEMS, INC.
2120 WEST GUADALUPE ROAD, GILBERT, ARIZONA, 85223
Covered Property
(1)
Tetra-organic ammonium fluoride and HF in supercritical fluid for photoresist and residue removal
Application:
10/442,557 →
Publication:
US 2004/0177867
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.