IP Library Assignment 014107/0945
Patent Assignment
Reel/Frame 014107/0945

Assignment of Assignor's Interest

Recorded: 2003-05-20 Pages: 2
Assignor
SCHILLING, PAUL E.
Executed: 2003-04-24
Assignee
SUPERCRITICAL SYSTEMS, INC.
2120 WEST GUADALUPE ROAD, GILBERT, ARIZONA, 85223
Covered Property (1)
Tetra-organic ammonium fluoride and HF in supercritical fluid for photoresist and residue removal
Application: 10/442,557 →
Publication: US 2004/0177867
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jul 6, 2004
From: SUPERCRITICAL SYSTEMS, INC.
To: TOKYO ELECTRON LIMITD
Reel/Frame 015535/0288 →