Assignment of Assignor's Interest

Recorded: 2004-07-06 Pages: 2

Assignor

SUPERCRITICAL SYSTEMS, INC.

Executed: 2004-06-29

Assignee

TOKYO ELECTRON LIMITD

AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-848, JAPAN

Covered Property (1)

Tetra-organic ammonium fluoride and HF in supercritical fluid for photoresist and residue removal

Application: 10/442,557 →

Publication: US 2004/0177867

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.