IP Library › Patent Application 10442557
Patent Application Utility
App. No. 10/442,557 · Confirmation No. 5296

Tetra-organic ammonium fluoride and HF in supercritical fluid for photoresist and residue removal

Inventor: Paul E. Schilling
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2006-10-06 ABN Abandonment 2 View
2006-10-06 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2006-03-30 CTFR Final Rejection 11 View
2006-03-30 1449 List of References cited by applicant and considered by examiner 2 View
2006-02-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-01-23 WFEE Fee Worksheet (SB06) 1 View
2006-01-23 FWCLM Index of Claims 1 View
2006-01-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-01-17 CLM Claims 4 View
2006-01-17 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2005-11-14 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-11-14 TRNA Transmittal of New Application 2 View
2005-11-14 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-11-04 CTNF Non-Final Rejection 10 View
2005-11-04 892 List of references cited by examiner 1 View
2005-11-04 1449 List of References cited by applicant and considered by examiner 2 View
2005-11-04 SRFW Search information including classification, databases and other search related notes 1 View
2005-10-19 SRNT Examiner's search strategy and results 6 View
2005-09-13 WFEE Fee Worksheet (SB06) 1 View
2005-08-17 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-08-17 TRNA Transmittal of New Application 2 View
2005-08-17 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-08-15 RCEX Request for Continued Examination (RCE) 1 View
2005-08-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-08-15 CLM Claims 5 View
2005-08-15 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2005-08-15 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2005-07-29 CTAV Advisory Action (PTOL-303) 3 View
2005-07-29 1449 List of References cited by applicant and considered by examiner 1 View
2005-07-29 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-07-20 WFEE Fee Worksheet (SB06) 1 View
2005-07-14 A.NE Response After Final Action 1 View
2005-07-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-07-14 LET. Miscellaneous Incoming Letter 1 View
2005-05-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-05-16 TRNA Transmittal of New Application 2 View
2005-05-16 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-05-12 CTFR Final Rejection 7 View
2005-05-12 1449 List of References cited by applicant and considered by examiner 2 View
2005-05-12 SRFW Search information including classification, databases and other search related notes 1 View
2005-05-04 SRNT Examiner's search strategy and results 6 View
2005-02-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-02-15 LET. Miscellaneous Incoming Letter 2 View
2005-02-15 N417 Electronic Filing System Acknowledgment Receipt 1 View
2005-02-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-02-10 CLM Claims 4 View
2005-02-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2005-02-10 WFEE Fee Worksheet (SB06) 1 View
2005-02-10 FWCLM Index of Claims 1 View
2005-01-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2005-01-07 WFEE Fee Worksheet (SB06) 1 View
2005-01-07 FWCLM Index of Claims 1 View
2004-12-27 A.I. Informal or Non-Responsive Amendment 2 View
2004-12-27 CLM.NE Claim-Amendment Not Entered 4 View
2004-12-27 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-12-27 136A Authorization for Extension of Time all replies 2 View
2004-11-22 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-11-22 FOR Foreign Reference 28 View
2004-09-29 CTNF Non-Final Rejection 6 View
2004-09-29 1449 List of References cited by applicant and considered by examiner 23 View
2004-09-29 892 List of references cited by examiner 1 View
2004-09-29 BIB Bibliographic Data Sheet 1 View
2004-09-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-22 SRNT Examiner's search strategy and results 17 View
2004-08-30 A.PE Preliminary Amendment 2 View
2004-08-30 SPEC Specification 1 View
2004-08-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-08-30 DRW Drawings-only black and white line drawings 1 View
2004-06-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-06-10 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2004-05-17 RESC Rescind Nonpublication Request for Pre Grant Publication 2 View
2003-11-07 IDS Information Disclosure Statement (IDS) Form (SB08) 27 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 6 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 6 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 12 View
2003-11-07 FOR Foreign Reference 21 View
2003-11-07 FOR Foreign Reference 24 View
2003-11-07 FOR Foreign Reference 18 View
2003-11-07 FOR Foreign Reference 10 View
2003-11-07 FOR Foreign Reference 7 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 12 View
2003-11-07 FOR Foreign Reference 3 View
2003-11-07 FOR Foreign Reference 12 View
2003-11-07 FOR Foreign Reference 13 View
2003-11-07 FOR Foreign Reference 14 View
2003-11-07 FOR Foreign Reference 2 View
2003-11-07 FOR Foreign Reference 1 View
2003-11-07 FOR Foreign Reference 5 View
2003-11-07 FOR Foreign Reference 5 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 10 View
2003-11-07 FOR Foreign Reference 1 View
2003-11-07 FOR Foreign Reference 1 View
2003-11-07 FOR Foreign Reference 37 View
2003-11-07 FOR Foreign Reference 30 View
2003-11-07 FOR Foreign Reference 36 View
2003-11-07 FOR Foreign Reference 66 View
2003-11-07 FOR Foreign Reference 19 View
2003-11-07 FOR Foreign Reference 45 View
2003-11-07 FOR Foreign Reference 38 View
2003-11-07 FOR Foreign Reference 35 View
2003-11-07 FOR Foreign Reference 62 View
2003-11-07 FOR Foreign Reference 78 View
2003-11-07 FOR Foreign Reference 46 View
2003-11-07 FOR Foreign Reference 8 View
2003-11-07 FOR Foreign Reference 22 View
2003-11-07 FOR Foreign Reference 10 View
2003-11-07 FOR Foreign Reference 12 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-05-20 TRNA Transmittal of New Application 2 View
2003-05-20 SPEC Specification 15 View
2003-05-20 CLM Claims 4 View
2003-05-20 ABST Abstract 1 View
2003-05-20 DRW Drawings-only black and white line drawings 5 View
2003-05-20 OATH Oath or Declaration filed 1 View
2003-05-20 WFEE Fee Worksheet (SB06) 1 View
2003-05-20 WFEE Fee Worksheet (SB06) 1 View
2003-05-20 WCLM Claims Worksheet (PTO-2022) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/442,557
Filed
2003-05-20
Pub. No.
US20040177867A1
Art Unit
1746