Patent Assignment
Reel/Frame 014116/0868
Assignment of Assignor's Interest
Recorded: 2003-05-29
Pages: 2
Assignors
TANAKA, JUNICHI
Executed: 2003-04-07
KITSUNAI, HIROYUKI
Executed: 2003-04-07
YAMAMOTO, HIDEYUKI
Executed: 2003-03-27
KAGOSHIMA, AKIRA
Executed: 2003-03-27
SHIRAISHI, DAISUKE
Executed: 2003-05-09
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Processing Semiconductor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.