Method and apparatus for processing semiconductor
View Patent ↗In a semiconductor processing apparatus including a process chamber, a sample stand for holding a sample in the process chamber, and a process gas supply unit for supplying a process gas to the process chamber, a plurality of samples of a lot are successively supplied to a process chamber to be successively processed in an intra-lot successive process. The apparatus includes a state sensor for detecting a state in the process chamber and an intra-lot variation pattern prediction unit for predicting, according to sensor data detected by the state sensor, intra-lot variation patterns of results of the intra-lot successive process. According to a result of the prediction by the intra-lot variation pattern prediction unit, the apparatus changes a process condition applied to a sample of the lot.
1. A processing apparatus which performs a lot process in which a plurality of samples of a lot are successively processed in a process chamber, comprising:
the process chamber;
a sample stand to hold a sample in the process chamber;
a process gas supply unit to supply a process gas to the process chamber;
a state sensor programmed to detect a state in the process chamber during a lot pre-stabilizing process which is conducted prior to the lot process; and
a process condition setting unit including:
an intra-lot variation pattern database programmed to correspondingly store therein, sensor data candidates detectable by the state sensor during the lot pre-stabilizing process and corresponding intra-lot variation patterns;
an intra-lot variation pattern prediction unit programmed to predict an intra-lot variation pattern of a lot to be processed next by referring to the intra-lot variation pattern database according to the sensor data detected by the state sensor, and to calculate a machining dimension variation for each sample of the lot to be processed next based on the predicted intra-lot variation pattern of a lot to be processed next; and
an intra-lot process condition setting unit programmed to calculate a quantity of correction of a process condition for each sample of a lot to be processed next based on the machining dimension variation for each sample of the lot to be processed next calculated by the intra-lot variation pattern prediction unit prior to starting the lot process.
2. An apparatus according to claim 1 , wherein the sensor data of the state sensor includes sensor data of spectra of light emission from plasma in the process chamber.
3. An apparatus according to claim 1 , wherein when there is no intra-lot variation pattern corresponding to the sensor data detected by the state sensor within the intra-lot variation pattern database, the intra-lot variation pattern prediction unit is programmed to calculate a target intra-lot variation pattern in an intermediate state through interpolation using the intra-lot variation patterns of the intra-lot variation pattern database.
4. An apparatus according to claim 1 , wherein:
the intra-lot variation pattern prediction unit refers to the intra-lot variation pattern database and and is programmed to calculate the machining dimension variation for each sample of the lot to be processed next, prior to processing any sample of the lot to be processed next; and,
the intra-lot process condition setting unit is programmed to calculate the quantity of correction of the process condition for each sample of the lot, prior to processing any sample of the lot to be processed next.
5. A processing apparatus configured to performs a lot process in which a plurality of samples of a lot are successively processed in a process chamber, comprising:
the process chamber;
a sample stand to hold a sample in the process chamber;
a process gas supply unit to supply a process gas to the process chamber;
a state sensor programmed to detect a state in the process chamber during a lot pre-stabilizing process conducted prior to the lot process; and
a process condition setting unit including:
an intra-lot variation pattern database programmed to correspondingly store therein sensor data candidates detectable by the state sensor during the lot pre-stabilizing process and corresponding intra-lot variation patterns;
an intra-lot variation pattern prediction unit programmed to predict an intra-lot variation pattern of a lot to be processed next by referring to the intra-lot variation pattern database according to the sensor data detected by the state sensor, and to calculate a machining dimension variation for each sample of the lot to be processed next based on the predicted intra-lot variation pattern of the lot to be processed next;
a machining contour control recipe database programmed to store recipes to control machining contours; and
an intra-lot process condition setting unit programmed to calculate a quantity of correction of a recipe for each sample of the lot to be processed next by referring to the machining contour control recipe database based on the machining dimension variation for each sample of the lot to be processed next calculated by the intra-lot variation pattern prediction unit.
6. An apparatus according to claim 5 , wherein the sensor data of the state sensor includes sensor data of spectra of light emission from plasma in the process chamber.
7. An apparatus according to claim 5 , wherein when there is no intra-lot variation pattern corresponding to the sensor data detected by the state sensor within the intra-lot variation pattern database, the intra-lot variation pattern prediction unit is programmed to calculate a target intra-lot variation pattern in an intermediate state through interpolation using the intra-lot variation patterns of the intra-lot variation pattern database.
8. An apparatus according to claim 5 , wherein:
the intra-lot variation pattern prediction unit refers to the intra-lot variation pattern database and is programmed to calculate the machining dimension variation for each sample of the lot to be processed next, prior to processing any sample of the lot to be processed next; and,
the intra-lot process condition setting unit is programmed to calculate the quantity of correction of the process condition for each sample of the lot, prior to processing any sample of the lot to be processed next.