Patent Assignment
Reel/Frame 014180/0757
Assignment of Assignor's Interest
Recorded: 2003-06-11
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus and Method for Providing a Signal Port in a Polishing Pad for Optical Endpoint Detection
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.