Assignment of Assignor's Interest

Recorded: 2003-06-18 Pages: 2

Assignor

BERGMAN, ERIC J.

Executed: 2003-06-04

Assignee

SEMITOOL, INC.

655 WEST RESERVE DRIVE, KALISPELL, MONTANA, 59901

Covered Property (1)

Vapor Phase Etching Mems Devices

Patent: 7,279,431 →

Application: 10/464,597 →

Publication: US 2004/0259370

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.