Patent Assignment
Reel/Frame 014207/0409
Assignment of Assignor's Interest
Recorded: 2003-12-18
Pages: 2
Assignor
WANG, ALBERT
Executed: 2003-11-24
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Dual chamber vacuum processing system
Application:
10/624,728 →
Publication:
US 2004/0089227
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.