Patent Assignment
Reel/Frame 014234/0365
Assignment of Assignor's Interest
Recorded: 2003-07-03
Pages: 4
Assignors
LOKAI, PETER
Executed: 2003-06-03
SCHROEDER, THOMAS
Executed: 2003-06-03
KLEINSCHMIDT, JUERGEN
Executed: 2003-06-03
STAMM, UWE
Executed: 2003-06-04
VOGLER, KLAUS WOLFGANG
Executed: 2003-06-06
Assignee
LAMBDA PHYSIK AG
HANS-BOECKLER-STRASSE 12, GOETTINGEN, D-37079, GERMANY
Covered Property
(1)
Absolute Wavelength Calibration of Lithography Laser Using Multiple Element or Tandem See Through Hollow Cathode Lamp
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.