Patent Assignment
Reel/Frame 014256/0266
Assignment of Assignor's Interest
Recorded: 2003-07-08
Pages: 2
Assignors
LUEDECKE, JENS
Executed: 2003-04-28
ZAZCEK, CHRISTOPH
Executed: 2003-05-08
PAZIDIS, ALEXANDRA
Executed: 2003-05-05
ULLMANN, JENS
Executed: 2003-05-07
MUEHLPFORDT, ANNETTE
Executed: 2003-05-21
THIER, MICHAEL
Executed: 2003-05-08
WIESNER, STEFAN
Executed: 2003-05-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method and Device for Decontaminating Optical Surfaces
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.