Patent Assignment
Reel/Frame 014287/0871
Assignment of Assignor's Interest
Recorded: 2004-01-28
Pages: 3
Assignor
COX, GERALD
Executed: 2003-12-19
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Method of Heating a Substrate in a Variable Temperature Process Using a Fixed Temperature Chuck
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.