Patent Assignment
Reel/Frame 014307/0242
Assignment of Assignor's Interest
Recorded: 2004-02-05
Pages: 5
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
System and Method for Automated Focus Measuring of a Lithography Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.