Patent Assignment
Reel/Frame 014399/0519
Assignment of Assignor's Interest
Recorded: 2003-08-11
Pages: 4
Assignors
WALDFRIED, CARLO
Executed: 2003-08-11
ESCORCIA, ORLANDO
Executed: 2003-08-11
HAN, QINGYUAN
Executed: 2003-08-11
BUCKLEY, THOMAS
Executed: 2003-08-11
SAKTHIVEL, PALANI
Executed: 2003-08-11
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Ashing Process
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →